Plasma Stripper - Gasonics Aura 1000

Gasonics Aura 1000 Plasma Stripper (Upgraded) from Allwin21
Description:

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Wafer handling problems with Indexer System? Allwin21 has replaced the GaSonics Aura 1000 wafer handling system with the superior 3-axis Equipe ATM Wafer Handling Robot. This gives the A 1000 a much superior wafer transport system with proven reliability, higher throughput, increased MTBF and lower overall cost. Along with fewer headaches, better peace-of-mind, and longer coffee breaks.
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GaSonic Aura 1000 Plasma System is the microprocessor controlled down-stream, or “ afterglow” photoresist stripper that will strip the front and backside of a wafer, typically in less than one minute. The unit is fully automated, cassette-to-cassette, and is a single-wafer process design.
Combined with Allwin21 Corp advanced Equip Robot transfer wafer technology , Superior Temperature Control Technology and AW Control Software, upgraded Gasonics Aura 1000 provides significant advantages over the original systems.
Use Equip robot wafer transfer instead of the index of the original, which will decrease the down time and low the wafer damage, particles greatly.
Single-wafer process
3”, 4”, 5” and 6” wafer capability
Automatic Equip robot wafer loader / unloader
 Infrared heat source for process temperature control
Downstream processing: No wafer radiation damage(