Plasma Stripper is a Used Machinery product. Key specs — Origin: USA.
Product Description
Gasonics Aura 1000 Plasma Stripper (Upgraded) from Allwin21 Description:
*********************** Wafer handling problems with Indexer System? Allwin21 has replaced the GaSonics Aura 1000 wafer handling system with the superior 3-axis Equipe ATM Wafer Handling Robot. This gives the A 1000 a much superior wafer transport system with proven reliability, higher throughput, increased MTBF and lower overall cost.
Along with fewer headaches, better peace-of-mind, and longer coffee breaks. *************************************** GaSonic Aura 1000 Plasma System is the microprocessor controlled down-stream, or “ afterglow” photoresist stripper that will strip the front and backside of a wafer, typically in less than one minute.
The unit is fully automated, cassette-to-cassette, and is a single-wafer process design. Combined with Allwin21 Corp advanced Equip Robot transfer wafer technology , Superior Temperature Control Technology and AW Control Software, upgraded Gasonics Aura 1000 provides significant advantages over the original systems.
Use Equip robot wafer transfer instead of the index of the original, which will decrease the down time and low the wafer damage, particles greatly.
Single-wafer process 3”, 4”, 5” and 6” wafer capability Automatic Equip robot wafer loader / unloader Infrared heat source for process temperature control Downstream processing: No wafer radiation damage(
